Bryansk, Bryansk, Russian Federation
The article discusses the tasks of automating production processes in microelectronics manufacturing. It presents the architecture for a production control system for microelectronics products; analyses the standard manufacturing technology for such products. The paper describes an algorithm for processing batches of semiconductor wafers during manual production operations performed by operators; develops a message flow diagram between the four components of the production control system; synthesizes a functional IDEF0 model for equipment control consisting of seven blocks. The mechanisms within the model include the equipment dispatcher and the communication controller, while the output signals are the recipe, technological parameters, and the warning and error log. The results obtained in this article should serve as a basis for further research aimed at creating a Petri Net model to verify correctness and assess the performance and workload of the key equipment involved in the serial production cycle of microelectronics products.
production control system, IDEF0, message flow diagram, Petri Net, equipment dispatcher
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