@article{Achkasov2025multiphysical, author={Achkasov, A.V. and Yagodkin, A.S. and Makarenko, F.V.}, title={Multiphysical modeling of microelectronic systems with heterogeneous integration}, journal={Modeling of systems and processes}, publisher={FSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov}, year={2025}, pages={20-27}, volume={18}, issue={3}, }