@article{Ivanin2026designing, author={Ivanin, P.S. and Gusev, E.E. and Dyuzhev, N.A.}, title={Designing radiation-resistant multilayer MEMS covers taking into account thermomechanical limitations}, journal={Modeling of systems and processes}, publisher={FSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov}, year={2026}, pages={37-53}, volume={19}, issue={1}, }