TY  JOUR
TI  Designing radiation-resistant multilayer MEMS covers taking into account thermomechanical limitations
KW  microelectromechanical systems
KW  mechanical reliability
KW  multilayer cover
KW  design of radiation-resistant protective covers of MEMS devices
KW  thermoelastic stresses
KW  ionizing radiation from outer space
JO  Modeling of systems and processes
AU  Ivanin, P.S.
AU  Gusev, E.E.
AU  Dyuzhev, N.A.
PY  2026
IS  19
PB  FSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov