%0 Journal Article
%T FUNCTIONAL MODEL OF EQUIPMENT CONTROL  FOR MICROELECTRONICS MANU-FACTURING
%A Dantsev, O.O.
%K production control system, IDEF0, message flow diagram, Petri Net, equipment dispatcher
%J Automation and modeling in design and management
%D 2026
%N 2026
%P 5
%I Bryansk State Technical University