TY  JOUR
TI  FUNCTIONAL MODEL OF EQUIPMENT CONTROL  FOR MICROELECTRONICS MANU-FACTURING
KW  production control system
KW  IDEF0
KW  message flow diagram
KW  Petri Net
KW  equipment dispatcher
JO  Automation and modeling in design and management
AU  Dantsev, O.O.
PY  2026
IS  2026
PB  Bryansk State Technical University