TY JOUR TI The effect of angular velocity on the formation of defects during the formation of films by centrifugation KW mathematical modeling KW centrifugation KW thin films KW photolithography KW splashes KW layered flow. JO Actual directions of scientific researches of the XXI century: theory and practice AU Borodina, E.. PY 2014 IS 2 PB FSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov