00768naa#a2200193#i#450# EN\\bibl\105058 20260124213243.6 2219-0767 20251016b2025####ek#y0engy0150####ca RU Multiphysical modeling of microelectronic systems with heterogeneous integration Journal article Voronezh FSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov 2025 7 с. Journal article local Прикладные информационные (компьютерные) технологии. 004.9 Achkasov A. Vladimirovich Yagodkin A. Sergeevich Makarenko F. V. zh-szf.ru