00532naa#a2200169#i#4500001001500000005001700015011001400032100004100046101000800087102000700095200013200102210005400234215001000288608002700298700002300325856001400348EN\\bibl\1254020240708015551.1##a2223-4608##a20160704b2016####ek#y0engy0150####ca0#aRUS##aRU1#aStructure formation in surface layer of machine parts by methods of high-vacuum annealing and ion implantationeJournal article1#aBryanskcBryansk State Technical Universityd2016##a3 с.##aJournal article2local#1aShalygingMikhail 4#azh-szf.ru