00568naa#a2200193#i#4500001001500000005001700015011001400032100004100046101000800087102000700095200010100102210005400203215001000257608002700267700002700294700002100321700001800342856001400360EN\\bibl\1354020250130032918.4##a1999-8775##a20160930b2016####ek#y0engy0150####ca0#aRUS##aRU1#aOPTICAL CIRCUITS OF HOLOGRAPHIC CONTROL PLANT  OF MICRORELIEF FORMATION PROCESSeJournal article1#aBryanskcBryansk State Technical Universityd2016##a8 с.##aJournal article2local#1aPoyarkovgVyacheslav  #1aBelkingEvgeniy #1aMarkovgOleg 4#azh-szf.ru