00568naa#a2200193#i#450# EN\\bibl\13540 20250130030939.4 1999-8775 20160930b2016####ek#y0engy0150####ca RUS RU OPTICAL CIRCUITS OF HOLOGRAPHIC CONTROL PLANT OF MICRORELIEF FORMATION PROCESS Journal article Bryansk Bryansk State Technical University 2016 8 с. Journal article local Poyarkov Vyacheslav Belkin Evgeniy Markov Oleg zh-szf.ru