LDR 00506naa#a2200169#i#450# 001 EN\\bibl\14350 005 20240919072517.4 011 ## _a1999-8775 100 ## _a20140930b2014####ek#y0engy0150####ca 101 0# _aRUS 102 ## _aRU 200 1# _aDevelopment process of assisted filtered cathodic-vacuum-arc deposition (AFCVAD). _eJournal article 210 1# _aBryansk _cBryansk State Technical University _d2014 215 ## _a3 с. 608 ## _aJournal article _2local 700 #1 _aVereshchaka _gAleksey 856 4# _azh-szf.ru _u