00506naa#a2200169#i#4500001001500000005001700015011001400032100004100046101000800087102000700095200010300102210005400205215001000259608002700269700002600296856001400322EN\\bibl\1435020240919071746.4##a1999-8775##a20140930b2014####ek#y0engy0150####ca0#aRUS##aRU1#aDevelopment process of assisted filtered cathodic-vacuum-arc deposition (AFCVAD).eJournal article1#aBryanskcBryansk State Technical Universityd2014##a3 с.##aJournal article2local#1aVereshchakagAleksey 4#azh-szf.ru