00506naa#a2200169#i#450# EN\\bibl\14350 20241109024730.6 1999-8775 20140930b2014####ek#y0engy0150####ca RUS RU Development process of assisted filtered cathodic-vacuum-arc deposition (AFCVAD). Journal article Bryansk Bryansk State Technical University 2014 3 с. Journal article local Vereshchaka Aleksey zh-szf.ru