00584naa#a2200169#i#450# EN\\bibl\2847 20251222043253.1 2308-8877 20140616b2014####ek#y0engy0150####ca RUS RU Technology producing multilayer metallization on silicon surface using amorphous alloy Journal article Voronezh FSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov 2014 2 с. Journal article local Pashaev I. zh-szf.ru