00666naa#a2200193#i#4500001002200000005001700022011001400039100004100053101000800094102000700102200010100109210005100210215001000261608002700271675009300298700003900391700002800430856001400458EN\INFRA-M\bibl\2996620241001025958.2##a2500-3313##a20190716b2019####ek#y0engy0150####ca0#aRUS##aRU1#aDevelopment of an automated process control system for grinding silicon carbideeJournal article1#aMoscowcINFRA-M Academic Publishing LLC.d2019##a3 с.##aJournal article2local##aИнженерное дело. Техника в целом. Транспорт. 62zRUS#1aRybal'chenkogNikita Vladimirovich#1aSilaevagElena Yur'evna4#azh-szf.ru