00727naa#a2200193#i#450# EN\\bibl\30317 20260207125150.6 2219-0767 20190826b2019####ek#y0engy0150####ca RU REVIEW OF SUBMICRON VLSI CAD SOFTWARE AND ACCOUNTING FOR ELECTROPHYSICAL EFFECTS OF DEEP SUBMICRON LEVEL Journal article Voronezh FSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov 2019 7 с. Journal article local Прикладные науки. Общие вопросы. 60 Zolnikov V. K. Savchenko Andrey Kulay A. zh-szf.ru