00894naa#a2200217#i#4500001001500000005001700015011001400032100004100046102000700087200020900094210013700303215001000440608002700450675006700477700001600544700001600560700003900576700001900615700002800634856001400662EN\\bibl\3776520241105120958.2##a2219-0767##a20200526b2020####ek#y0engy0150####ca##aRU1#aDEVELOPMENT OF THE DESIGN ENVIRONMENT AND ASSESSMENT OF THE MANUFACTURABILITY OF THE CHIP PRODUCTION TAKING INTO ACCOUNT THE RESISTANCE TO SPECIAL FACTORS ON THE EXAMPLE OF VLSI 1867VTS6FeJournal article1#aVoronezhcFSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozovd2020##a5 с.##aJournal article2local##aПрикладные науки. Общие вопросы. 60#1aSklyargV. #1aSmerekgV. #1aZolnikovgKonstantin Vladimirovich#1aChernovgD. N.#1aYagodkingA. Sergeevich4#azh-szf.ru