00992naa#a2200241#i#450# EN\\bibl\55487 20241124215530.7 2219-0767 20221213b2022####ek#y0engy0150####ca RU Features of the design of microcircuits made using deep-submicron technologies Journal article Voronezh FSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov 2022 10 с. Journal article local Прикладные информационные (компьютерные) технологии. 004.9 Электротехника. 621.3 Achkasov A. Vladimirovich Solodilov Maksim Vital'evich Litvinov Nikolay Nikolaevich Chubunov Pavel Aleksandrovich Zolnikov V. K. Shehovcov Dmitriy Vital'evich Bordyuzha Oleg Leonidovich zh-szf.ru