00865naa#a2200193#i#4500001001500000005001700015011001400032100004100046102000700087200010500094210013700199215001000336608002700346675018100373700003400554700003700588700003200625856001400657EN\\bibl\6498420241213070601.5##a2219-0767##a20230614b2023####ek#y0engy0150####ca##aRU1#aVerilog-A model of the impurity freeze-out in LDD regions at cryogenic temperatureseJournal article1#aVoronezhcFSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozovd2023##a7 с.##aJournal article2local##aЭлектронные элементы, использующие свойства твердого тела. Полупроводниковая электроника. 621.382#1aOsykingAndrey Aleksandrovich#1aPotupchikgAleksandr Georgievich#1aPanyshevgKirill Andreevich4#azh-szf.ru