00563naa#a2200169#i#450# EN\\bibl\7458 20260517062941.7 2409-7829 20141120b2014####ek#y0engy0150####ca RUS RU MEMS AND NEMS: RELEVANCE AND EXPERIENCE OF SECURITY Journal article Voronezh FSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov 2014 2 с. Journal article local Novikova Tatyana Petrovna zh-szf.ru