00706naa#a2200193#i#4500001001500000005001700015011001400032100004100046102000700087200011100094210005400205215001000259608002700269675009500296700003400391700003700425700003600462856001400498EN\\bibl\8853020241109001130.6##a2658-6436##a20240930b2024####ek#y0engy0150####ca##aRU1#aAPPLYING SCANNING ELECTRON MICROSCOPY IN REVERSE ENGINEERING OF ELECTRONIC COMPONENT BASEeJournal article1#aBryanskcBryansk State Technical Universityd2024##a8 с.##aJournal article2local##aЭлектрические полупроводниковые приборы. 621.382.2/.3#1aMalakhanovgAlexey Alexeevich#1aPugachevgAleksandr Anatolyevich#1aMarkovagValeria Konstantinovna4#azh-szf.ru