OVERVIEW OF METHODS FOR MEASURING THE MECHANICAL STRENGTH OF THIN FILMS
Abstract and keywords
Abstract (English):
This review article discusses methods for measuring the main mechanical properties of thin films: tensile testing, indentation, evaluation of the mechanical strength margin for the curvature of the plate-thin film system, bulge method and research using a deformed and resonant cantilever. In the process of critical analysis of domestic and foreign literary sources, the advantages and disadvantages of the methods were revealed; the authors' motivation for conducting such studies was explained. In addition to the existing widely used methods, an original and relatively new technique is given - the use of electric current as a controlled means of applying thermo mechanical stresses to electrical conductors to characterize their fatigue behavior. Approaches for increasing the mechanical strength of thin films are also indicated.

Keywords:
Mechanical properties, strength, yield strength, mechanical stresses, Young's modulus, grain size, material fatigue, thin films, defects, deformation, MEMS
References

1. Technique for Analyzing Volumetric Defects Using Digital Elevation Model of a Surface / A.A. Dedkova, I.V. Florinsky, E.E. Gusev [et. al.] // Russian Journal of Nondestructive Testing. - 2021. - Vol. 57(11). - Pp. 1000-1007. - DOI:https://doi.org/10.31857/S01303082211100.

2. Fonseca, D.J. On MEMS Reliability and Failure Mechanisms / D.J. Fonseca, M. Sequera // International Journal of Quality, Statistics and Reliability. - 2011. - P. 1-7. - DOI:https://doi.org/10.1155/2011/820243.

3. Microelectromechanical System Sensor Market by Type and Application: Global Opportunity Analysis and Industry Forecast, 2019-2026, Allied Market Research. - URL: Microelectromechanical System Market by Type, and Application: Global Opportunity Analysis and Industry Forecast, 2019-2026 (researchandmarkets.com) (data obrascheniya: 07.07.2022).

4. Microelectromechanical Systems for Nanomechanical Testing: Electrostatic Actuation and Capacitive Sensing for High-Strain-Rate Testing / C. Li, D. Zhang, G. Cheng, Y. Zhu // Experimental Mechanics. - 2020. - Vol. 60. - P. 329-343. - DOI:https://doi.org/10.1007/s11340-019-00565-5.

5. Khan, N. Design and development of a MEMS butterfly resonator using synchronizing beam and out of plane actuation / N. Khan, M.J. Ahamed // Microsystem Technologies. - 2020. - Vol. 26. - Pp. 1643-1652. - DOI:https://doi.org/10.1007/s00542-019-04705-8.

6. Thermal Management Using MEMS Bimorph Cantilever Beams / R.A. Coutu Jr, R.S. LaFleur, J.P.K. Walton [et al.] // Experimental Mechanics. - 2016. - Vol. 56. -Pp. 1293-1303. - DOI:https://doi.org/10.1007/s11340-016-0170-1.

7. Size Effects of Hardness and Strain Rate Sensitivity in Amorphous Silicon Measured by Nanoindentation / D.M. Jarząbek, M. Milczarek, S. Nosewicz [et al.] // Metall Mater Trans A. - 2020. - Vol. 51. - Pp. 1625-1633. - DOI:https://doi.org/10.1007/s11661-020-05648-w.

8. Rosenmayer, C.T. Mechanical Testing of Thin Films / C.T. Rosenmayer, F.R. Brotzen, R.J. Gale // MRS Online Proceedings Library. - 1988. - Vol. 130. - Pp. 77-86. - DOI:https://doi.org/10.1557/PROC-130-77.

9. Brotzen, F.R. Mechanical testing of thin films / F.R. Brotzen, S. Moore // International Materials Reviews. - 1994. - Vol. 39. Pp. 24-45. - DOI:https://doi.org/10.1179/095066094790150973.

10. Tensile Properties of FreeStanding Aluminum Thin Films / D.T. Read, Y.W. Cheng, R.R. Keller, J.D. McColskey // Scripta Materialia.- 2001. - Vol. 45 (5). - Pp. 583-589.

11. A New Method for Tensile Testing of Thin Films / J.A. Ruud, D. Josell, F. Spaepen, A.L. Greer // Journal of Materials Research. - 1993. - Vol. 8(1). - Pp. 112-117. - DOI:https://doi.org/10.1017/S0884291400120412.

12. Espinosa, H.D. Plasticity Size Effects in Free-Standing Submicron Polycrystalline FCC Films Subjected to Pure Tension / H.D. Espinosa, B.C. Prorok, B. Peng // Journal of the Mechanics and Physics of Solids. - 2004. - Vol. 52(3). - Pp. 667-689. - DOI:https://doi.org/10.1016/J.JMPS.2003.07.001.

13. Haque, M.A. Deformation Mechanisms in Free-Standing Nanoscale Thin Films: A Quantitative in situ Transmission Electron Microscope Study / M.A. Haque, M.T.A. Saif // Proceedings of the National Academy of Sciences of the United States of America. - 2004. - Vol. 101(17). - Pp. 6335-6340. - DOI:https://doi.org/10.1073/PNAS.0400066101.

14. Ruoff, A.L. The Fracture and Yield Strengths of Diamond, Silicon and Germanium / Ruoff, A.L. // High-Pressure Science and Technology. Springer, Boston, MA, 1979. - Pp. 1557-1580. - DOI:https://doi.org/10.1007/978-1-4684-7470-1_194.

15. Vanlandingham, M.R. Review of Instrumented Indentation / M.R. Vanlandingham // Journal of Research of the National Institute of Standards and Technology. - 2003. - Vol. 108(4). - Pp. 249-265. - DOI:https://doi.org/10.6028/jres.108.024.

16. Marchesini, O. Vickers Indentation Curves of Magnesium-Oxide (MgO) / O. Marchesini, G. Meille // Journal of Tribology-Transactions of the ASME. - 1984. - Vol. 106(1). - Pp. 43-48. - DOI:https://doi.org/10.1115/1.3260865.

17. Doerner, M.F. A Method for Interpreting the Data from Depth-Sensing Indentation Measurements / M.F. Doerner, W.D. Nix // Journal of Materials Research. - 1986. - Vol. 1(4). - Pp. 601-616. - DOI:https://doi.org/10.1557/JMR.1986.0601.

18. Oliver, W.C. An Improved Technique for Determining Hardness and Elastic-Modulus Using Load and Displacement Sensing Indentation Experiments / W.C. Oliver, G.M. Pharr // Journal of Materials Research. - 1992. - Vol. 7(6). - Pp. 1564-1583. - DOI:https://doi.org/10.1557/JMR.1992.1564.

19. King, R.B. Sliding Contact Stresses in A Two-Dimensional Layered Elastic Half-Space / R.B. King, T.C. Osullivan // International Journal of Solids and Structures. - 1987. - Vol. 23(5). - Pp. 581-597. - DOI:https://doi.org/10.1016/0020-7683(87)90019-9.

20. Tsui, T.Y. Influences of Stress on the Measurement of Mechanical Properties Using Nanoindentation: Part 1. Experimental Studies in an Aluminum Alloy / T.Y. Tsui, W.C. Oliver, G.M. Pharr // Journal of Materials Research. - 1996. - Vol. 11(3). - Pp. 752-759. - DOI:https://doi.org/10.1557/JMR.1996.0091.

21. Bolshakov, A. Influences of Stress on the Measurement of Mechanical Properties Using Nanoindentation: Part 2. Finite Element Simulations / A. Bolshakov, W.C. Oliver, G.M. Pharr // Journal of Materials Research. - 1996. - Vol. 11(3). - Pp. 760-768. - DOI:https://doi.org/10.1557/JMR.1996.0092.

22. Hainsworth, S.V. Analysis of nanoindentation load-displacement loading curves / S.V. Hainsworth, H.W. Chandler, T.F. Page // Journal of Materials Research. - 1996. - Vol. 11(8). - Pp. 1987-1995. - DOI:https://doi.org/10.1557/JMR.1996.0250.

23. Berriche, R. Vickers Hardness from Plastic Energy / R. Berriche // Scripta Metallurgica et Materialia. - 1995. - Vol. 32(4). - Pp. 617-620. - DOI:https://doi.org/10.1016/0956-716X(95)90847-D.

24. Li, X. D.; Bhushan, B. A Review of Nanoindentation Continuous Stiffness Measurement Technique and Its Applications / X.D. Li, B. Bhushan // Materials Characterization. - 2002. - Vol. 48(1). - Pp. 11-36. - DOI:https://doi.org/10.1016/S1044-5803(02)00192-4.

25. Hohlova, Yu. Indentirovanie ot makro- do nano- i primery issledovaniy svoystv materialov s osoboy strukturoy / Yu. Hohlova, M. Hohlov // Paton Electric Welding Institute of NAS of Ukraine. - 2016. - № 12. - DOI:https://doi.org/10.13140/RG.2.2.22072.96008.

26. Ignatovich, S.R. Opredelenie mikromehanicheskih harakteristik poverhnosti materialov s ispol'zovaniem nanoindentometra «Mikron-gamma» / S.R. Ignatovich, I.M. Zakiev, V.I. Zakiev // Vestnik Har'kovskogo nacional'nogo avtomobil'no-dorozhnogo universiteta. - 2008. - T. 42. - S. 86-89.

27. GOST R 8.748-2011. Gosudarstvennaya sistema obespecheniya edinstva izmereniy. Metally i splavy. Izmerenie tverdosti i drugih harakteristik materialov pri instrumental'nom indentirovanii. Chast' 1. Metod ispytaniy : data vvedeniya 2011.12.13. - Moskva : Standartinform, 2013. - 28 s.

28. Oliver, W.C. Mesurement of hardness and elastic modulus by instrumented indentation: Advances in understanding and refinements to methodology / W.C. Oliver, G.M. Pharr // Journal of Materials Research. - 2004. - Vol. 19, № 1. - DOI:https://doi.org/10.1557/jmr.2004.19.1.3.

29. Size Effects of Hardness and Strain Rate Sensitivity in Amorphous Silicon Measured by Nanoindentation / D.M. Jarzabek, M. Milczarek, S. Nosewicz [et al.] // Metallurgical and Materials Transactions A. - 2020. - Vol. 51. - Pp. 1625-1633. - DOI:https://doi.org/10.1007/s11661-020-05648-w.

30. Freund, L.B. Thin Film Materials: Stress, Defect Formation and Surface Evolution / L.B. Freund, S. Suresh // Cambridge University Press: Cambridge, 2003. - 820 p.

31. Ohring, M. Materials Science of Thin Films, Deposition and Structure / M. Ohring // Academic Press: San Diego, CA, 2002. - 808 p.

32. Nix, W.D. Mechanical-Properties of Thin-Films / W.D. Nix // Metallurgical Transactions A. - 1989. - Vol. 20(11). - Pp. 2217-2245. - DOI:https://doi.org/10.1007/BF02666659.

33. Jankowski, A.F. Effects of Deflection on Bulge Test Measurements of Enhanced Modulus in Multilayered Films / A.F. Jankowski, T. Tsakalakos // Thin Solid Films. - 1996. - Vol. 291. - Pp. 243-247. - DOI:https://doi.org/10.1016/S0040-6090(96)09031-1.

34. Small, M.K. Analysis of the Accuracy of the Bulge Test in Determining the Mechanical-Properties of Thin-Films / M.K. Small, W.D. Nix // Journal of Materials Research. - 1992. - Vol. 7 (6). - Pp. 1553-1563. - DOI:https://doi.org/10.1557/JMR.1992.1553.

35. Liechti, K. M. Large-Scale Yielding in Blister Specimens / K.M. Liechti, A. Shirani // International Journal of Fracture. - 1994. - Vol. 67 (1). - Pp. 21-36. - DOI:https://doi.org/10.1007/BF00032362.

36. Pressure and friction dependent mechanical strength - cracks and plastic flow / D.A. Wiegand, B. Redingius, K. Ellis, C. Leppard // International Journal of Solids and Structures. - 2011. - Vol. 48, I. 11-12. - Pp. 1617-1629. - DOI:https://doi.org/10.1016/j.ijsolstr.2011.01.025.

37. Gusev, E. Investigating Mechanical Strength of Multilayer Membranes for MEMS Converters of Physical Quantities / Gusev, E., Dedkova, A. Djuzhev // Nanoindustry Russia. - 2018. - № 1. - Pp. 538-541. - DOI:https://doi.org/10.22184/1993-8578.2018.82.538.541.

38. Jinling, Y. Fracture Properties of LPCVD Silicon Nitride and Thermally Grown Silicon Oxide Thin Films from the Load-Deflection of Long Si3N4 and SiO2/Si3N4 Diaphragms / Y. Jinling, G. João, P. Oliver // Journal of Microelectromechanical Systems. - 2008. - Vol. 17, I. 5. - Pp. 1120-1134. - DOI:https://doi.org/10.1109/JMEMS.2008.928706.

39. Venkatraman, R. Separation of film thickness and grain boundary strengthening effects in Al thin films on Si / R. Venkatraman, J.C. Bravman, // Journal of Materials Research. - 1992. - Vol. 7, I. 8. - Pp. 2040-2048. - DOI:https://doi.org/10.1557/JMR.1992.2040.

40. Experimental Determination of Mechanical Properties of the Anode Cell of an X-Ray Lithograph / N. Djuzhev, E. Gusev, A. Dedkova [et. al.] // Technical Physics. - 2020. - Vol. 65(11). - Pp. 1755-1759. - DOI:https://doi.org/10.1134/S1063784220110055.

41. Petersen, K.E. Youngs Modulus Measurements of Thin-Films Using Micromechanics / K.E. Petersen, C.R. Guarnieri // Journal of Applied Physics. - 1979. - Vol. 50 (11). - Pp. 6761-6766. - DOI:https://doi.org/10.1063/1.325870.

42. Osterberg, P. M. M-TEST: A Test Chip for MEMS Material Property Measurement Using Electrostatically Actuated Test Structures / P.M. Osterberg, S.D. Senturia // Journal of Microelectromechanical Systems. - 1997. - Vol. 6 (2). - Pp. 107-118. - DOI:https://doi.org/10.1109/84.585788.

43. Mechanical Deflection of Cantilever Microbeams - A New Technique for Testing the Mechanical-Properties of Thin-Films / T.P. Weihs, S. Hong, J.C. Bravman, W.D. Nix // Journal of Materials Research. - 1988. - Vol. 3 (5). - Pp. 931-942. - DOI:https://doi.org/10.1557/JMR.1988.0931.

44. Mönig, R. Thermal Fatigue Testing of Thin Metal Films / R. Mönig, R.R. Keller, C.A. Volkert, // Review of Scientific Instruments. - 2004. - Vol. 75 (11). - Pp. 4997-5004. - DOI:https://doi.org/10.1063/1.1809260.

45. Microstructure Evolution During Alternating-Current-Induced Fatigue / R.R. Keller, R.H. Geiss, Y.-W. Cheng, D.T. Read // Proceedings of the International Mechanical Engineering Conference and Exposition 2004. - American Society of Mechanical Engineers, 2004. - Pp. 107-112.

46. Geiss, R.H. TEM Study of Dislocation Loops in Deformed Aluminium Films / R.H. Geiss, D.T. Read, R.R. Keller // Microscopy and Microanalysis. - 2005. - Vol. 11 (S02). - Pp. 1870-1871. - DOI:https://doi.org/10.1017/S1431927605508626.

47. Strain-Induced Grain Growth During Rapid Thermal Cycling of Aluminum Interconnects / R.R. Keller, R.H. Geiss, N. Barbosa [et al.] // Metallurgical and Materials Transactions A. - 2007. - Vol. 38 (13). - Pp. 2263- 2272. - DOI:https://doi.org/10.1007/s11661-006-9017-1.

48. The Effect of Ion Beam Etching on Mechanical Strength Multilayer Aluminum Membranes / E.E. Gusev, A.V. Borisova, A.A. Dedkova, A.A. Salnikov, V.Y. Kireev // 2019 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus). - 2019. - Pp. 1990-1994. - DOI:https://doi.org/10.1109/eiconrus.2019.8657243.

49. Vlasov, A.I. Analiz vliyaniya formy membrany na mehanicheskuyu prochnost' i stabil'nost' parametrov MEMS-sensorov davleniya / A.I. Vlasov, T.A. Civinskaya, V.A. Shahnov // Problemy razrabotki perspektivnyh mikro- i nanoelektronnyh sistem (MES). - 2016. - № 4. - S. 65-70.

50. Microscopis strength of silicon partiles in an aluminium-silicon alloy / M.G. Mueller, M. Fornabaio, G. Zagar, A. Mortensen // Acta Materialia. - 2016. - Vol. 105(15). - Pp. 165-175. - DOI:https://doi.org/10.1016/j.actamat.2015.12.006.

51. Clemens, B.M. Structure and Strength of Multilayers / B.M.Clemens, H. Kung, S.A. Barnett // MRS Bulletin. - 1999. - Vol. 24. - Pp. 20-26. - DOI:https://doi.org/10.1557/S0883769400051502.

52. Morris, M.A. The effect of geometrically necessary dislocations on grain refinement during severe plastic deformation and subsequent annealing of Al-7% Si / M.A. Morris, I. Gutierrez-Urrutia, D.G. Morris, // Materials Science and Engineering A. - 2008. - Vol. 493. - Pp. 141-147. - DOI:https://doi.org/10.1016/j.msea.2007.07.096.

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